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PETS Inc. Sputtering System (Sputter Up Configuration).
Sputtering Systems are used for depositing metal conducting layers on
substrates. PETS Inc.'s design for sources are of the magnetron configuration
and utilizes D.C. Power Supplies in all of its systems.
Key Benefits
 | Computer operation guarantees identical process parameters from run to
run. |
| Data logging for every automatic run (event driven). |
| Store limitless number of recipes (.rcp files). |
| Chambers available in Anodized Aluminum or Stainless Steel. |
| One set of chamber liners are included. |
| Water cooled magnetron source, platen and chamber. |
| Add purging cycles if you wish. |
| + or - 8% uniformity guarantee for dynamic sputtering and + or - 12%
static. |
| Process support available. |
| System includes direct drive mechanical pump (14 cfm) with all connecting
fittings and turbo pump w/controller. |
| D.C. power supply IS 500 Watts (1000 Watts is an option). |
| Options: Down Stream Pressure Control, Turbo Pumping, Cryo Pumping, Oil
Filtration, additional source, etching station and additional AFC's (Call for pricing). |
Pricing
| Description |
MODEL
# |
| 16" Al. Chamber, w/2 AFC's, 2 sources (3") |
PETS-SPUT-A16-2 |
| 16" SS Chamber, w/2 AFC's, 2 sources (3") |
PETS-SPUT-SS16-2 |
| 20" Al. Chamber, w/2 AFC's , 2 sources (4") |
PETS-SPUT-A20-2 |
| 20" SS Chamber, w/2 AFC's , 2 sources (4") |
PETS-SPUT-SS20-2 |
| 24" Al. Chamber, w/2 AFC's, 2 sources (6") |
PETS-SPUT-A24-2 |
| 24" SS Chamber, w/2 AFC's, 2 sources (6") |
PETS-SPUT-SS24-2 |
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