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                            PETS Inc. Computer Control System.

PETS Inc. will take your old manually controlled system, refurbish all salvageable portions (usually chambers, valving, cabinetry, gauging and pumps) and reconfigure it for either RIE, PECVD or SPUTTERING. Converted system will be computer controlled.

Key Benefits

bulletSoftware is Windows NT 4.0 disk operating system and written in Visual Basic.
bulletManual mode operation (mouse driven) for process development and troubleshooting.
bulletAutomatic mode operation allows for unlimited number of recipes. (.rcp files).
bulletData logging for every automatic run (event driven).
bulletComputer is IBM Compatible, ATX cabinet, OS2 with Intel Pentium III @ 500 MHz, 128 MRam, 10.4 Gbyte hard drive, 3 1/2" floppy drive, 40X CD Rom Drive and 17" Monitor.

Capabilities

PETS Inc. has done many of these conversions. Systems that lend themselves to this type of conversion are:

TECHNICS--- PEII-A Plasma Etcher, 800 & 8000 Series RIE Systems, 900 & 9000 Series PECVD Systems

PLASMA THERM - RIE Etchers and PECVD Systems , Oxford RIE and PECVD Systems, Plasma Lab RIE

and PECVD Systems as well as several AXIC and TEGAL Systems.

Pricing

Description MODEL #       
Conversion  w/2 AFC's, Low Freq. RF PETS-CON-2-LF    
Conversion  w/4 AFC's, Low Freq. RF  PETS-CON-4-LF    
Conversion  w/2 AFC's , High Freq. RF PETS-CON-2-HF    
Conversion  w/4 AFC's , High Freq. RF PETS-CON-4-HF    
 

 

 

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