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                PETS Inc. Ion Milling System.

Ion Milling Systems are used for removing materials that typically cannot be easily removed by standard dry etching systems (such as ceramics, tungsten, tantalum and copper including copper/aluminum, etc.). Ion Mills are used for removing many easily dry etched materials as well since incident angle can be controlled allowing for custom contouring of side walls in trenches.

Key Benefits

bulletComputer operation guarantees identical process parameters from run to run.
bulletData logging for every automatic run (event driven).
bulletStore limitless number of recipes (.rcp files).
bulletChambers available in Anodized Aluminum or Stainless Steel.
bulletWater cooled Kaufman Source Gun and chamber.
bulletAdd purging cycles if you wish.
bullet+ or - 5% uniformity guarantee.
bulletProcess support available.
bulletSystem includes direct drive mechanical pump (14 cfm) with all connecting fittings and Turbo Pump.
bulletOptions: Cryo Pump, Oil Filtration and additional AFC's (Call for pricing).

 

Pricing

Description MODEL #
2"Gun & System PETS-IM-2
5" Gun & System PETS-IM-5
8" Gun & System PETS-IM-8
 

 

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