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PETS Inc. Barrel Ashing System.
Barrel Ashing or Stripping Systems are predominantly used for removing resist
from boat loads of wafers or substrates at one time. They are also used for
descumming. The isotropic etch results in a bulls eye etching pattern (which is
no problem for removing resist but must be seriously considered if etching other
materials).
Key Benefits
 | Computer operation guarantees identical process parameters from run to
run. |
| Data logging for every automatic run (event driven). |
| Store limitless number of recipes (.rcp files). |
| Chambers available in Anodized Aluminum or Stainless Steel. |
| Water cooled chamber. |
| Add purging cycles if you wish. |
| Process support available. |
| System includes direct drive mechanical pump (14 cfm) with all connecting
fittings. |
| Choice of high frequency (13.56 MHz) or low frequency(40 KHz) power
supplies. |
| Options: Down Stream Pressure Control, Scrubber, Oil Filtration, Floor
Model Cabinets and additional AFC's (Call for pricing). |
Pricing
| Description |
MODEL
# |
| 12" Al. Chamber, w/2 AFC's , Low Freq. RF |
PETS-ASH-A12-2-LF |
| 12" Al. Chamber, w/4 AFC's , Low Freq. RF |
PETS-ASH-A12-4-LF |
| 12" SS Chamber, w/2 AFC's, Low Freq. RF |
PETS-ASH-SS12-2-LF |
| 12" SS Chamber, w/4 AFC's , Low Freq. RF |
PETS-ASH-SS12-4-LF |
| 16" Al. Chamber, w/2 AFC's , Low Freq. RF |
PETS-ASH-A16-2-LF |
| 16" Al. Chamber, w/4 AFC's, Low Freq. RF |
PETS-ASH-A16-4-LF |
| 16" SS Chamber, w/2 AFC's, Low Freq. RF |
PETS-ASH-SS16-2-LF |
| 16" SS Chamber, w/4 AFC's, Low Freq. RF |
PETS-ASH-SS16-4-LF |
| 12" Al. Chamber, w/2 AFC's , High Freq. RF |
PETS-ASH-A12-2-HF |
| 12" Al. Chamber, w/4 AFC's , High Freq. RF |
PETS-ASH-A12-4-HF |
| 12" SS Chamber, w/2 AFC's, High Freq. RF |
PETS-ASH-SS12-2-HF |
| 12" SS Chamber, w/4 AFC's , High Freq. RF |
PETS-ASH-SS12-4-HF |
| 16" Al. Chamber, w/2 AFC's , High Freq. RF |
PETS-ASH-A16-2-HF |
| 16" Al. Chamber, w/4 AFC's, High Freq. RF |
PETS-ASH-A16-4-HF |
| 16" SS Chamber, w/2 AFC's, High Freq. RF |
PETS-ASH-SS16-2-HF |
| 16" SS Chamber, w/4 AFC's, High Freq. RF |
PETS-ASH-SS16-4-HF |
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