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Reactive Ion Etching Systems are normally used for cleaning, descumming,
stripping resist and etching a multitude of materials (conductive and
dielectric). Side wall contours result in an anisotropic (vertical), right angle
bottom trench.
Key Benefits
 | Computer operation guarantees identical process parameters from run to
run. |
| Data logging for every automatic run (event driven). |
| Store limitless number of recipes (.rcp files). |
| Chambers available in Anodized Aluminum or Stainless Steel. |
| Water cooled electrode, chamber and baseplate. |
| Aluminum Oxide (ceramic) insulator. |
| Add purging cycles if you wish. |
| + or - 5% uniformity guarantee. |
| Process support available. |
| System includes direct drive mechanical pump (14 cfm) with all connecting
fittings. |
| Choice of high frequency (13.56 MHz) or low frequency(40 KHz) power
supplies. |
| Options: Down Stream Pressure Control, Turbo Pumping, Scrubber, Oil
Filtration, Floor Model Cabinets and additional AFC's (Call for pricing). |
Pricing
| Description |
MODEL
# |
| 12" Al. Chamber, w/2 AFC's , Low Freq. RF |
PETS-RIE-A12-2-LF |
| 12" Al. Chamber, w/4 AFC's , Low Freq. RF |
PETS-RIE-A12-4-LF |
| 12" SS Chamber, w/2 AFC's, Low Freq. RF |
PETS-RIE-SS12-2-LF |
| 12" SS Chamber, w/4 AFC's , Low Freq. RF |
PETS-RIE-SS12-4-LF |
| 16" Al. Chamber, w/2 AFC's , Low Freq. RF |
PETS-RIE-A16-2-LF |
| 16" Al. Chamber, w/4 AFC's, Low Freq. RF |
PETS-RIE-A16-4-LF |
| 16" SS Chamber, w/2 AFC's, Low Freq. RF |
PETS-RIE-SS16-2-LF |
| 16" SS Chamber, w/4 AFC's, Low Freq. RF |
PETS-RIE-SS16-4-LF |
| 12" Al. Chamber, w/2 AFC's , High Freq. RF |
PETS-RIE-A12-2-HF |
| 12" Al. Chamber, w/4 AFC's , High Freq. RF |
PETS-RIE-A12-4-HF |
| 12" SS Chamber, w/2 AFC's, High Freq. RF |
PETS-RIE-SS12-2-HF |
| 12" SS Chamber, w/4 AFC's , High Freq. RF |
PETS-RIE-SS12-4-HF |
| 16" Al. Chamber, w/2 AFC's , High Freq. RF |
PETS-RIE-A16-2-HF |
| 16" Al. Chamber, w/4 AFC's, High Freq. RF |
PETS-RIE-A16-4-HF |
| 16" SS Chamber, w/2 AFC's, High Freq. RF |
PETS-RIE-SS16-2-HF |
| 16" SS Chamber, w/4 AFC's, High Freq. RF |
PETS-RIE-SS16-4-HF |
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